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日本YAMATO等離子清洗機(jī)PB600/PB1000S/PA600D

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產(chǎn)品型號(hào)PB600/PB1000S/PA600D

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更新時(shí)間：2023-08-23 08:41:28瀏覽次數(shù)：361次

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產(chǎn)品簡介

詳細(xì)介紹

日本YAMATO等離子清洗機(jī)PB600/PB1000S/PA600D是中型等離子清洗機(jī)

以下是型號(hào)的詳細(xì)介紹：

Gas Plasma Ashers
PB600/PB1000S/PA600D
Model
PB600 PB1000S PA600D
Plasma Mode
DP DF
DP :Direct Plasma
DF : Downflow
High-frequency Output
Max.600W Max.1000W Max.600W
Oscillating Frequency
13.56 MHz
Dimension of Stage(mm)
?200×300 ?300×500 for6-inch
wafer
  • The PB series are of barred typeofdirect plasma method, and can be operated automatically bysimplesetting.
  • The model PA600is a plasmaashingsystem after the downflow method, which copes with a6-inchwafer.

Downflow method



Specifications
Model PB600 PB1000S PA600D
Plasmamethod Barred type of DP mode DF mode
Electrode Splitof Opposite electrode structure Roundtypeelectrode structure
RFgenerator 0 to 600W 50to1,000W 0 to 600W
Oscillating frequency 13.56MHz
Controlsystem Digitaldisplaywith PLC control Touch panelwithPLC Digitaldisplaywith one touch operation
Tuningmethod Automatic and Manual tuning
Timer 1sec.to 9H 59min.59 sec.
Chamber Madeof quart glass
Chambersize ?200×300mmL ?300×500mmL Adapt for 6inchwafer
Chambertemperature Digital display
Reactiongas O2,CF4 or others O2,Ar,CF4,C5F8,SF6 or others
Purgegas N2 or Dry air
Flowmeter Flow meter1line
(O2 0 to 1,000 ml/min.) 		Massflow control with digital display
(CF4 0 to 300sccm, O2 0 to 1,000sccm)
Vacuumgauge Piranie type
(0.4 to 3,000Pa/0.004 to 30Torr) 		Digital display (0.4 to 3,000Pa/0.004 to 30Torr)
Vacuumpump 250ml/min. 700ml/min.
Emargencystop switch Pushtype switch
Gasport 1 line (1/4"SUSSwagelok) 2line(1/4" SUS Swagelok)
Purgeport 1 line (1/4"SUSSwagelok) 1line(1/4" SUS Swagelok)
Vacuumport 1 line (SUSNW25) 1line( SUS NW25)
Externaldimensions 500mmW×600mmD×650mmH 640mmW×850mmD×1,695mmH 650mmW×800mmD×1,500mmH
Powersupply AC200/220/380V, 3 phase
and AC100/220V, single phase
Weight Approx.130kg Approx.180kg Approx.150kg

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