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日本YAMATO等離子清洗機(jī)PR300/301

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產(chǎn)品型號(hào)PR300/PR301

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日本YAMATO等離子清洗機(jī)PR300/301：

Low Temperature Asher
PR300/PR301
Model
300 301
Method
Barrel type of DP
DP : direct plasma
High-frequency Output
Max.300W
Oscillating Frequency
13.56MHz
Reaction Chamber
?64×160mm
3 chambers 		?118×160mm
1 chamber

The PR 300 isagasplasma device that is used widely for suchapplicationsasproduction of semiconductors and analysis work.Itboastsoutstanding operabi lity and safety, with anautomatictuningsystem as a standard component and other features.It has acompactdesign, with a small-size HF generator and anoscillationsectionintegrated with a portion of the chamber,allowing it tobeinstalled into a 19-inch rack.

  • Three 64mm diameterchambersareincluded. (PR300)
  • The unit can be set for awiderangeof output conditions to handle a variety oftestingsamples.
  • One 118mm diameter largechamberisaccommodated.

*The gas plasmaequipment has a wide range ofapplications fromashing, etching,dry cleaning,etc.


* Reaction Chamber
PR300 Reaction Chamber PR300 Reaction Chamber
* Control Panel
PR300 Control Panel


* Operation Flowchart
PR300 Operation Flowchart
* Piping System Diagram (PR300)
PR300 Piping System Daigram


Specifications
Model PR300 PR301
*Method Barrel type of direct plasma
* Controlpart
Highfrequency output 300Wvariable (100W×3 chambers)
Oscillating frequency 13.56MHz
Outputimpedance 50Ω
Tuningmethod Manual biaxial tuning method
Instrument Output watt meter (0 to 300W)
Reflected wave watt meter (0 to 100W)
Vacuum gauge, bourdon's tube type
Flow meter, needle valve integrated type, 1 set
Timer 0.1sec. to 999h
Gasinlet 1/4"stainless steel
Powersource (50/60Hz) AC100/220V, single phase, 1 kVA
* Reactionpart
Reactionchamber Made ofsuperhardglass, ?64×160mm×3 chanbers Madeofpyrexglass, ?118×160mm
Electrodestructure Condenser type, 2-way split
Controlsystem Autopressure reduction, auto leak valve
Pipingmaterial Stailesssteel,Teflon, Copper and Brass Stainlesssteel,Teflon
Externaldimensions(W×D×Hmm) 438×520×556 438×520×656
Weight Approx.38kg Approx. kg
* StandardAccessories
  • Vacuum grease :1 container
  • O-ring for reactionchamber:6pcs.
  • Sample dish (large andsmall):each4sets
  • Lid for reactionchamber:4sets
  • Adapter for ground:1pc.
* OptionalAccessories
* Sample dish(large)* Sample dish (small)* Sample shelf* Stand

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