UHF-120高頻顯微激光測(cè)振儀 UHF-120 超高頻激光測(cè)振儀的顯著特點(diǎn)是其具有極大的測(cè)量帶寬，可高分辨率對(duì)高達(dá) 2.4 GHz 的面外振動(dòng)進(jìn)行。UHF-120具有小于1μm的高橫向分辨率，這尤其對(duì)聲表面波 (SAW) 分量的表面波可視化起決定性作用。另一個(gè)應(yīng)用涉及驗(yàn)證體聲波 (BAW) 分量和超高頻率范圍內(nèi)成像。UHF-120測(cè)量結(jié)果包含大帶寬范圍內(nèi)的振動(dòng)信息，可一次性快速地識(shí)別諧振頻率。通過安裝在軟件控制的高精度xy 工作臺(tái)的樣品移動(dòng)，完成全場(chǎng)測(cè)量。光學(xué)振動(dòng)測(cè)量，對(duì)樣品沒有任何附加質(zhì)量影響高達(dá) 2.4 GHz 的超聲頻振動(dòng)分析詳細(xì)顯示振型高振幅分辨率適應(yīng)性激光功率，保護(hù)敏感樣品和表面高橫向分辨率，用于測(cè)量短波長(zhǎng)兼容普通 MEMS 探針站

詳細(xì)介紹

Next generation micro- and nanotechnology devices such as micro-acoustic filters, RF-MEMS and ultrasonic transducers involve high frequency mechanical vibration and wave propagation approaching GHz frequencies. For microscopic devices operating at these frequencies only sophisticated optical techniques can provide the spatial resolution, zero mass loading and vibration sensitivity required for proper characterization.

UHF-120 Ultra High Frequency Vibrometer captures real-time, out-of-plane motions of micro devices with picometer sensitivity and a measurement bandwidth of up to 2.4 GHz. Options provide for either a manual point-by-point system (VibSoft) or an automated scanning system (PSV Soft) capturing and analyzing deflection shapes.

Technical data
Metrological specifications
Max. vibration frequency	600 MHz	1.2 GHz (optional)			2.4 GHz (optional)
Maximum measurement time	3.906 ms	3.906 ms			1.963 ms
Max. sample rate	40 GSa/s
Amplitude resolution of UHF-A-120 data acquisition	8 bit

Displacement-amplitude resolution	1.5 pm at 2.5 kHz resolution bandwidth (corresponds to 30 fm/√(Hz))
Max. number of FFT lines for a vibration spectrum	2,343,750	4,687,500			2,343,750
Best frequency resolution	256 Hz	256 Hz			512 Hz
Number of reference channels	1

Optical specifications
Laser type	solid state
Laser wavelength	532 nm, visible green beam
Laser spot diameter	< 2.5 µm (1/e2) 1
Laser output	< 5 mW 2
Laser protection class	Class 3R
Camera type	1/4" CCD color board camera
Active pixels (H x V)	510 x 492
Illumination	integrated, bright-field
Objective	20x microscope objective 3
Field of view	0.71 mm x 0.55 mm (aprox.)
Working distance	20 mm


UHF-120 system configurations
	UHF-120 Ultra High Frequency Vibrometer		UHF-120-SV Scanning Ultra High Frequency Vibrometer
Vibrometer system	UHF-I-120 Sensor Head UHF-E-120 Controller
Data acquisition & Data management system	UHF-A-121 LeCroy Oscilloscope and Digitizer PC-I UHF 19" Industrial PC, 24" (61 cm) TFT monitor, keyboard and mouse
Software	VibSoft system software		PSV system software
XY-Stage	manual stage (optional)		A-PST-200P XY Precision Positioning Stage A-CTR-110 Axis Controller A-JST-0001 Joystick
Accessories	A-CAB-BAS System Cabinet for 19" electronic components A-MOB-020X 20x Microscope Objective 3 UHF-A-SAW SAW Filter test sample A-LSG-0532 Laser Safety Goggles Hardware manual, software manual and theory manual


UHF-I-120 Sensor Head
Dimensions [W x D x H]	158 x 129 x 376 mm
Weight	11.4 kg
Specification of motion axes
XY-Stage	A-SPK-0002 Sample Positioning Kit (optional)			A-PST-200P XY Precision Positioning Stage
Dimensions [W x D x H]	161 x 158 x 116 mm			310 x 310 x 135 mm
Weight	1.8 kg			21.6 kg
Lateral travel range	13 mm x 13 mm, manually actuated			200 mm x 200 mm, motorized
Repeatability (bi-directional)	N/A			+/- 0.5 µm
Tip-Tilt range	+/- 2.5°, manually actuated			+/- 2.5°, manually actuated
Load capacity	0.9 kg			10.0 kg
General specifications
Power	100 VAC… 240 VAC ±10%, 50/60 Hz 500 VA (typical)
Environmental conditions	Operating temperature: +18 °C … +30 °C (64.4 °F … 86 °C); Storage temperature: -10 °C … +65 °C (14 °F … 149 °F); Relative humidity: max. 80%, non-condensing
Compliance with standards
Electrical safety	Norm1: IEC/EN 61010-1:2011-07			Norm2: IEC/EN 61326-1:2013-07
	Emission: FCC Class A, IEC/EN 61000-3-2 and 61000-3-3
	Immunity: IEC/EN 61000-4-2 to 61000-4-6 and IEC/EN 61000-4-11

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